Grazing Incidence Small Angle X-ray Scattering (GISAXS) is a unique method for characterizing the nanostructural features of materials, particularly at surfaces and interfaces, which would otherwise be impossible using traditional transmission-based scattering techniques. It is a surface-sensitive tool for simultaneously probing the electron density of the sample both in-plane and out-of-plane, and is being increasingly utilized to measure the size, shape, and spatial organization of nanoscale objects located on top of surfaces or embedded in mono- or multi-layered thin film materials. Individual GISAXS images serve as static snapshots of nanoscale structure, while successive images provide a means to monitor and probe dynamical processes, including self-assembly or other reorganization events, which occur at nanometer length scales. The success of GISAXS relies on the unique information that can be extracted from

Grazing Incidence Small Angle X-ray Scattering (GISAXS)

X.S. Li, A. Hexemer, S. Chourou, A. Sarje

the data. Although microscopy techniques provide very valuable local information on the structure, GISAXS is the only one to provide statistical information on nanometer features averaged over large centimeter sample sizes. Presently a major bottleneck preventing GISAXS from reaching its full potential persists is the availability of data analysis and modeling resources for interpreting the data.